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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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MPXT4100 Manifold Absolute Pressure Sensors On-Chip Signal Conditioned, 0.25 V to 4.9 V Output, Temperature Compensated and Calibrated
The Motorola MPXT4100A/4101A/4105A series Manifold Absolute Pressure (MAP) sensor for engine control is designed to sense absolute air pressure within the intake manifold. This measurement can be used to compute the amount of fuel required for each cylinder. The small form factor and high reliability of on-chip integration makes the Motorola MAP sensor a logical and economical choice for automotive system designers. Features * 1.8% Maximum Error Over 0 to 85C * Specifically Designed for Intake Manifold Absolute Pressure Sensing in Engine Control Systems * Ideally Suited for Microprocessor Interfacing * Patented Silicon Shear Stress Strain Gauge * Temperature Compensated Over - 40C to +125C * Surface Mount Package * Ideal for Non-Automotive Applications * Also Available in Unibody Package Application Examples * Manifold Sensing for Automotive Systems
1 BASIC ELEMENT CASE 473A-01, STYLE 2
MPXT4101 MPXT4105 SERIES
4100A: 20-105 kPa 4101A: 15-102 kPa 4105A: 15-105 kPa X-ducerTM SILICON PRESSURE SENSORS
PIN NUMBER
Gnd +Vout VS 5 6 7 8 N/C N/C N/C N/C 2 Value 400 1000 - 40 to +125 - 40 to +125 Unit kPa kPa C C 3 4
MAXIMUM RATINGS (TC = 25C unless otherwise noted)
Rating Overpressure(1) (P1 > P2) Burst Pressure(1) (P1 > P2) Storage Temperature Operating Temperature
VS 3
Symbol Pmax Pburst Tstg TA
*Vout
NOTE: Pins 5, 6, 7, and 8 are not device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead.
X-ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
1
Vout
PINS 5, 6, 7 AND 8 ARE NO CONNECTS
The MPXT4100A/4101A/4105A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor, with its patented transducer, combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
Figure 1. Fully Integrated Pressure Sensor Schematic
Senseon and X-ducer are trademarks of Motorola, Inc.
Motorola Sensor Device Data (c) Motorola, Inc. 1997
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MPXT4100 MPXT4101 MPXT4105 SERIES
MPXT4100A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range Supply Voltage(2) Supply Current Offset(3) Full Scale Output(4) Full Scale Span(5) Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR Io+ Min 20 4.85 -- 0.225 4.816 4.510 -- -- -- -- Typ -- 5.1 7.0 0.306 4.897 4.591 -- 54 1.0 0.1 Max 105 5.35 10 0.388 4.978 4.672 1.8 -- -- -- Unit kPa Vdc mAdc V Vdc V %VFSS mV/kPa ms mA
MECHANICAL CHARACTERISTICS
Characteristic Weight, Basic Element (Case 473) Warm-Up Time(8) Cavity Volume Volumetric Displacement Common Mode Line Pressure(11) Symbol -- -- -- -- -- Min -- -- -- -- -- Typ 2.0 15 -- -- -- Max -- -- 0.01 0.001 690 Unit Grams mSec IN3 IN3 kPa
MPXT4101A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Range Supply Voltage(2) Supply Current Offset(3) Full Scale Output(4) Full Scale Span(5) Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR Io+ Min 15 4.85 -- 0.171 4.870 4.618 -- -- -- -- Typ -- 5.1 7.0 0.252 4.951 4.700 -- 54 1.0 0.1 Max 102 5.35 10 0.333 5.032 4.782 1.8 -- -- -- Unit kPa Vdc mAdc V Vdc V %VFSS mV/kPa ms mA
MECHANICAL CHARACTERISTICS
Characteristic Weight, Basic Element (Case 473) Warm-Up Time(8) Cavity Volume Volumetric Displacement Common Mode Line Pressure(11) Symbol -- -- -- -- -- Min -- -- -- -- -- Typ 2.0 15 -- -- -- Max -- -- 0.01 0.001 690 Unit Grams mSec IN3 IN3 kPa
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Motorola Sensor Device Data
MPXT4100 MPXT4101 MPXT4105 SERIES
MPXT4105A SERIES OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25C unless otherwise noted)
Characteristic Pressure Range Supply Voltage(2) Supply Current Offset(3) Full Scale Output(4) Full Scale Span(5) Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Offset Stability(9) (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Symbol POP VS Io Voff VFSO VFSS -- V/P tR Io+ -- Min 15 4.85 -- 0.184 4.804 -- -- -- -- -- -- Typ -- 5.1 7.0 0.306 4.896 4.590 -- 51 1.0 Max 105 5.35 10 0.428 4.988 Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc %VFSS
"1.8
-- -- -- --
--
"0.65
Typ 2.0 15 -- -- --
0.1
MECHANICAL CHARACTERISTICS
Characteristic Weight, Basic Element (Case 473) Warm-Up Time(8) Cavity Volume Volumetric Displacement Common Mode Line Pressure(11) Symbol -- -- -- -- -- Min -- -- -- -- -- Max -- -- 0.01 0.001 690 Unit Grams mSec IN3 IN3 kPa
NOTES: 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25C due to all sources of error including the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with minimum specified pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Span deviation per C over the temperature range of 0 to 85C, as a percent of span at 25C. * TcOffset: Output deviation per C with minimum pressure applied, over the temperature range of 0 to 85C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the product to meet the specified output voltage. 9. Offset Stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test. 10. Decoupling circuit shown in Figure 3 required to meet specification. 11. Common mode pressures beyond specified may result in leakage at the case-to-lead interface.
Motorola Sensor Device Data
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MPXT4100 MPXT4101 MPXT4105 SERIES
STAINLESS STEEL METAL COVER DIE WIRE BONDS P1 FLUORO SILICONE DIE COAT
Figure 2. Cross Sectional Diagram (Not to Scale) Figure 2 illustrates an absolute sensing chip in the basic chip carrier (Case 473). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPXT4100A/4101A/4105A series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.
5.0 4.5 4.0 OUTPUT (Volts) 3.5 3.0 2.5 2.0 1.5 1.0 0.5 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 MIN TRANSFER FUNCTION: Vout = Vs* (.01059*P-.152) Error VS = 5.1 Vdc TEMP = 0 to 85C 20 kPA TO 105 kPA MPXT4100A MAX
OUTPUT (Volts)
Pressure (ref: to sealed vacuum) in kPa
Figure 4. Output versus Absolute Pressure
5.0 4.5 4.0 OUTPUT (Volts) 3.5 3.0 2.5 2.0 1.5 1.0 0.5 MIN TRANSFER FUNCTION: Vout = Vs* (0.01*P-0.09) Error VS = 5.1 Vdc TEMP = 0 to 85C 15 kPA TO 105 kPA MPXT4105A
4
0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110
0
Pressure (ref: to sealed vacuum) in kPa
Figure 6. Output versus Absolute Pressure Motorola Sensor Device Data
5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 Pressure (ref: to sealed vacuum) in kPa
0
EEEEEEEEEEEE EEEEEEEEEEEE EEEEEEEEEEEE CCCC EEEEEEEEEEEE CCCC EEEEEEEEEEEE EEEEEEEEEEEE
EPOXY CASE LEAD FRAME 6.0 5.0 TYP 4.0 3.0 2.0 1.0 0.0
SENSOR OUTPUT (PIN 1) 50 pF 51 k
A/D
PROCESSOR
Figure 3. Decoupling Filter for Sensor to Microprocessor Interface Figure 3 shows a typical decoupling circuit for interfacing the integrated MAP sensor to the A/D input of a microprocessor. Proper decoupilng of the power supply is recommended. Figures 4, 5, and 6 show the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C. (The output will saturate outside of the specified pressure range.)
TRANSFER FUNCTION: Vout = Vs* (.01059*P-.109) Error VS = 5.1 Vdc TEMP = 0 to 85C 15 kPA TO 102 kPA MPXT4101A
MAX
TYP
MIN
Figure 5. Output versus Absolute Pressure
MAX TYP
MPXT4100 MPXT4101 MPXT4105 SERIES
Transfer Function (MPXT4100A)
Nominal Transfer Value: Vout = VS (P x 0.01059 - 0.1518) +/- (Pressure Error x Temp. Factor x 0.01059 x VS) VS = 5.1 V 0.25 Vdc
Temperature Error Band
MPXT4100A Series
4.0 Temp 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 - 40 0 to 85 +125 Multiplier 3 1 3
Temperature in C
Pressure Error Band
3.0 2.0 Pressure Error (kPa) 1.0 0.0 20 -1.0 - 2.0 - 3.0 Pressure 20 to 105 (kPa) Error (Max) 1.5 (kPa) 40 60 80 100 120 Pressure (in kPa) Error Limits for Pressure
Motorola Sensor Device Data
5
MPXT4100 MPXT4101 MPXT4105 SERIES
Transfer Function (MPXT4101A)
Nominal Transfer Value: Vout = VS (P x 0.01059 - 0.10941) +/- (Pressure Error x Temp. Factor x 0.01059 x VS) VS = 5.1 V 0.25 Vdc
Temperature Error Band
MPXT4101A Series
4.0 Temp 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 Temperature in C - 40 0 to 85 +125 Multiplier 3 1 3
Pressure Error Band
3.0 Pressure Error (kPa) 2.0 1.0 0.0 0 -1.0 - 2.0 - 3.0 Pressure 15 to 102 (kPa) Error (Max) 1.5 (kPa) 15 30 45 60 75 90 105 120 Pressure (in kPa) Error Limits for Pressure
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Motorola Sensor Device Data
MPXT4100 MPXT4101 MPXT4105 SERIES
Transfer Function (MPXT4105A)
Nominal Transfer Value: Vout = VS (P x 0.01 - 0.09) +/- (Pressure Error x Temp. Factor x 0.01 x VS) VS = 5.1 V 0.25 Vdc
Temperature Error Band
4.0
MPXT4105A Series
Temp 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 - 40 - 20 0 to 85 125
Multiplier 3.0 1.5 1.0 2.5
60
80
100
120
140
Temperature in C
NOTE: The Temperature Multiplier is a linear response from -40C to -20C, -20C to 0C, and from 85C to 125C
Pressure Error Band
3.0 2.0 Pressure Error (kPa) 1.0 0.0 20 -1.0 - 2.0 Pressure - 3.0 40 to 94 (kPa) 15 (kPa) 105 (kPa) Error (Max) 1.5 (kPa) 2.4 (kPa) 1.8 (kPa) 40 60 80 100 120 Pressure (in kPa) Error Limits for Pressure
Motorola Sensor Device Data
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MPXT4100 MPXT4101 MPXT4105 SERIES
ORDERING INFORMATION The MPXT4100A, MPXT4101A, AND MPXT4105A series MAP silicon pressure sensors are available to be shipped in rails.
Packing Options Rails Rails Rails Port Options Element Element Element Leadform 84 degree 84 degree 84 degree Case No. 473A-01 473A-01 473A-01 MPXT Series Order No. MPXT4100A7U MPXT4101A7U MPXT4105A7U Marking MPXT4100A MPXT4101A MPXT4105A
PACKAGE DIMENSIONS
-A-
8 1
G S DETAIL X DETAIL X P R
-B-
4 5
NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION A AND B DO NOT INCLUDE MOLD PROTRUSION. 4. MAXIMUM MOLD PROTRUSION 0.15 (0.006). 5. ALL VERTICAL SURFACES 5_TYPICAL DRAFT. 6. DIMENSION P TO CENTER OF LEAD WHEN FORMED PARALLEL. DIM A B C F G J L M P R S U INCHES MIN MAX 0.658 0.668 0.658 0.668 0.329 0.357 0.026 0.034 0.100 BSC 0.009 0.011 0.138 0.150 0_ 15 _ 0.738 0.748 0.503 0.523 0.002 0.020 0.135 0.145 STYLE 2: PIN 1. 2. 3. 4. 5. 6. 7. 8. MILLIMETERS MIN MAX 16.71 16.97 16.71 16.97 8.36 9.07 0.660 0.864 2.54 BSC 0.23 0.28 3.81 3.51 0_ 15_ 18.75 19.00 12.78 13.28 0.05 0.51 3.43 3.68
U C L M F 8 PL 0.25 (0.010) M T B -T-
SEATING PLANE
J
S
A
S
CASE 473A-01 ISSUE A
GROUND +VOUT VSUPPLY -VOUT N/C N/C N/C N/C
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. Mfax is a trademark of Motorola, Inc. How to reach us: USA / EUROPE / Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 Customer Focus Center: 1-800-521-6274 MfaxTM: RMFAX0@email.sps.mot.com - TOUCHTONE 1-602-244-6609 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; 8B Tai Ping Industrial Park, Motorola Fax Back System - US & Canada ONLY 1-800-774-1848 51 Ting Kok Road, Tai Po, N.T., Hong Kong. 852-26629298 - http://sps.motorola.com/mfax/ HOME PAGE: http://motorola.com/sps/ JAPAN: Nippon Motorola Ltd.: SPD, Strategic Planning Office, 4-32-1, Nishi-Gotanda, Shinagawa-ku, Tokyo 141, Japan. 81-3-5487-8488
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